发明名称 PYROELECTRIC PHOTODETECTOR, PYROELECTRIC PHOTODETECTION DEVICE AND ELECTRONIC INSTRUMENT
摘要 <P>PROBLEM TO BE SOLVED: To increase a detection output of a pyroelectric photodetector. <P>SOLUTION: A pyroelectric photodetector comprises: a substrate 20; a support member 30; a plurality of pyroelectric capacitors Capa supported by the support member 30. The support member 30 includes: a first face 30A; and a second face 30B facing the first face 30A. A cavity part 100 is formed between the second face 30B and the substrate 20. The plurality of pyroelectric capacitors Capa supported by the support member 30 are electrically connected in series in a direction where each polarization direction aligns. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013096787(A) 申请公布日期 2013.05.20
申请号 JP20110238552 申请日期 2011.10.31
申请人 SEIKO EPSON CORP 发明人 NODA TAKASHI
分类号 G01J1/02;G01J5/34;G01J5/48;G01V8/10 主分类号 G01J1/02
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