| 摘要 |
<p>A method for modulating arc current balancing of a double-filament ion source comprises a filament power supply 1 (1), a filament power supply 2 (2), a bias power supply 1 (3), a bias power supply 2 (4), an arc voltage power supply (5), a comparator 1 (6), a comparator 2 (7), and two hall sensors (8). First of all, the filament power supply 1 (1) is modulated and its bias current runs to a preset value. The bias power supply 1 (3) is then modulated until electrons acted under the arc voltage electric field form an arc current value equal to its preset value. Secondly, the filament power supply 2 (2) and the bias power supply 2 (4) are modulated individually based on the filament power supply 1 (1) and the bias power supply 1 (3). And according to detected feedback current values, input values of the power supplies are then modulated until a bias current and an arc current are both equal to their preset values. This kind of double-closed-loop controlling can achieve arc current balancing of the double-filament ion source.</p> |
