| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a room pressure control method at the start of air-conditioning operation where a clean room is protected against pollution by preventing the in-room air pressure of the clean room from becoming negative at the start of air-conditioning operation for the clean room. <P>SOLUTION: The room pressure control method at the start of air-conditioning operation executes a minute positive pressure holding means until a prescribed time passes since the start of air-conditioning operation for the clean rooms 11A, 11B subjected to smoking and decontamination with a formaldehyde gas. The minute positive pressure holding means uses motor dampers 17A, 17B to regulate an exhaust amount of air from the clean rooms 11A, 11B and keeps the in-room air pressure of the clean rooms 11A, 11B at previously set minute positive pressure. <P>COPYRIGHT: (C)2013,JPO&INPIT |
