PULSE LASER MACHINING APPARATUS, AND PULSE LASER MACHINING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pulse laser beam machining apparatus that improves the accuracy of positioning an irradiation spot of a pulse laser beam to enable a stable micromachining of a large workpiece surface and speed-up thereof.

SOLUTION: The pulse laser machining apparatus includes: a reference clock oscillation circuit for generating a clock signal; a first and second laser oscillator for emitting a first and second pulse laser beam synchronized with the clock signal; a first and second pulse picker for synchronizing with the clock signal to switch between passage and cutoff of the first and second pulse beams; a multiplexer for multiplexing the first and second pulse laser beams to produce a multiplexed pulse laser beam; a laser beam scanner for synchronizing with the clock signal to scan the multiplexed pulse laser beam only in a one-dimensional direction; and a stage on which a workpiece can be placed and that moves in a direction perpendicular to the one-dimensional direction.

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