| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spectrometer capable of quickly measuring a spectrum. <P>SOLUTION: A spectrometer 1 comprises: a wavelength variable interference filter 5 comprising a fixed substrate having a fixed reflective film, a movable substrate having a movable reflective film and an electrostatic actuator for changing a gap amount of an inter-reflective-film gap between the fixed reflective film and the movable reflective film; a detector 11 for detecting light intensity of light taken out by the wavelength variable interference filter 5; a voltage setting section 21 and a voltage controller 15 for applying an analog voltage continuously varying to the electrostatic actuator; a voltage monitoring section 22 for monitoring the voltage applied to the electrostatic actuator; and a light intensity acquiring section 24 for acquiring the light intensity detected by the detector 11 when the voltage monitored by the voltage monitoring section 22 becomes a predetermined voltage to be measured. <P>COPYRIGHT: (C)2013,JPO&INPIT |
