发明名称 COMPOUND, RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN FORMATION METHOD
摘要 The object is to provide a compound having high dissolvability in a safe solvent and high sensitivity, and also capable of obtaining a good resist pattern shape, a radiation-sensitive composition containing the same, and a resist pattern formation method using the composition. For this purpose, a compound (B) obtained by reaction between a polyphenol based cyclic compound (A) and a compound (C) having a particular structure, a radiation-sensitive composition containing the same, and a resist pattern formation method using the composition are provided.
申请公布号 US2013122423(A1) 申请公布日期 2013.05.16
申请号 US201113812831 申请日期 2011.07.25
申请人 ECHIGO MASATOSHI 发明人 ECHIGO MASATOSHI
分类号 G03F7/004;C07C43/307;C07C69/76;G03F7/20 主分类号 G03F7/004
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