| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray apparatus capable of stably obtaining a constant X-ray dose. <P>SOLUTION: An X-ray apparatus includes an X-ray source 1 and a power supply unit 17. The X-ray source 1 includes heaters 3a and 3b, an electron source 2, a target 20, and a vacuum case 18 having an X-ray transmission window 11. The power supply unit 17 includes a first ammeter 5 for measuring a value of a first current i1 flowing in the target 20, a second ammeter 6 for measuring a value of a second current i2 flowing in the heaters 3a and 3b, and a power source 13. The power source 13 outputs the second current i2 set at a certain value to the heaters 3a and 3b, and maintains the value of the second current at the certain value on the basis of information on the value of the second current measured by the second ammeter 6. <P>COPYRIGHT: (C)2013,JPO&INPIT |
