发明名称 SENSOR DEVICE AND METHOD
摘要 A sensor device and method. One embodiment provides a first semiconductor chip having a sensing region. A porous structure element is attached to the first semiconductor chip. A first region of the porous structure element faces the sensing region of the first semiconductor chip. An encapsulation material partially encapsulates the first semiconductor chip and the porous structure element.
申请公布号 US2013122660(A1) 申请公布日期 2013.05.16
申请号 US201313733375 申请日期 2013.01.03
申请人 INFINEON TECHNOLOGIES AG;INFINEON TECHNOLOGIES AG 发明人 ELIAN KLAUS;MEYER-BERG GEORG;THEUSS HORST
分类号 H01L21/56 主分类号 H01L21/56
代理机构 代理人
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