发明名称 SEMICONDUCTOR CHIP MOUNTING SUBSTRATE AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor chip mounting substrate and a manufacturing method of the same, which can achieve thinning of a gold plating film; which can reduce manufacturing cost of the semiconductor chip mounting substrate; which can reduce an occurrence of a bridge even when forming micro wiring; and which can achieve excellent wire bondability and solder connection reliability. <P>SOLUTION: A semiconductor chip mounting substrate comprises: an insulation layer 21 consisting primarily of a resin; copper circuits 22, 3, 5 formed on the insulation layer 21; an electrolytic nickel plating film 7 formed on at least a part of the copper circuits 22, 3, 5; and terminals for wire bonding formed on at least a part of the electrolytic nickel plating film 7 and on each of which a gold plating film 8 is formed. A mean value of crystal grain sizes of the gold plating film 8 on a surface opposite to the electrolytic nickel plating film 7 is 5 &mu;m and over. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013093360(A) 申请公布日期 2013.05.16
申请号 JP20110232804 申请日期 2011.10.24
申请人 HITACHI CHEMICAL CO LTD 发明人
分类号 H01L23/12;H01L21/60 主分类号 H01L23/12
代理机构 代理人
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