METHOD OF MANUFACTURING INERTIAL SENSOR

摘要

PURPOSE: An inertia sensor manufacturing method is provided to improve sensitivity by forming a mass of a material which density is relatively high. CONSTITUTION: An inertia sensor manufacturing method is as follows. A first depression is formed on one surface of a base substrate(11). A mass(125) is formed by charging metal or a combination of metal and a polymer into the first depression. A second depression(130) is formed on one surface of the base substrate in the outer side of the mass so that a flexible portion(135) is formed on the top of the second depression on the base substrate.