SEALING FILM FORMATION METHOD, SEALING FILM FORMATION DEVICE, AND ORGANIC LIGHT-EMITTING ELEMENT

摘要

A sealing film forming method is capable of forming a sealing film having high moisture permeability resistance in a shorter time and at lower cost. The sealing film forming method for forming a sealing film 13 that seals an EL device 12 includes forming a first inorganic layer 13a on a surface of the EL device 12; forming a hydrocarbon layer 13c on the first inorganic layer 13a; flattening the hydrocarbon layer 13c by softening or melting the hydrocarbon layer 13c; curing the hydrocarbon layer 13c; and forming a second inorganic layer 13e thicker than the first inorganic layer 13a on the hydrocarbon layer 13c after curing the hydrocarbon layer 13c.