发明名称 |
PHOTORESIST STRIPPER COMPOSITION |
摘要 |
PURPOSE: A photoresist exfoliating solution composition is provided to have an excellent performance of removing residue strip of resist by dry/wet etching in pattern formation, and to have an effect of not leaving anti-corrosive agent on the substrate surface by using an anti-corrosive agent having an excellent solubility to water and a solvent represented by chemical formula 2 in a manufacturing process of a flat panel display substrate. CONSTITUTION: A resist exfoliating solution composition includes 0.01-5 weight% of an anti-corrosive agent of chemical formula 1, 1-40 weight% of an alkali compound, and 55-90 weight% of solvents including a solvent of chemical formula 2 and other organic solvents. A resist exfoliating solution composition further includes deionized water. A resist exfoliating solution composition further includes at least one kind selected from the group consisting of azol compounds, quinone compounds and alkyl gallate compounds as the anti-corrosive agent. A flat panel display device is characterized in including a flat panel display substrate which is manufactured by using the resist exfoliating solution composition. |
申请公布号 |
KR20130049577(A) |
申请公布日期 |
2013.05.14 |
申请号 |
KR20110114677 |
申请日期 |
2011.11.04 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
LEE, YU JIN;KO, KYUNG JUN;KIM, SUNG SIK |
分类号 |
G03F7/42 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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