发明名称 PHOTORESIST STRIPPER COMPOSITION
摘要 PURPOSE: A photoresist exfoliating solution composition is provided to have an excellent performance of removing residue strip of resist by dry/wet etching in pattern formation, and to have an effect of not leaving anti-corrosive agent on the substrate surface by using an anti-corrosive agent having an excellent solubility to water and a solvent represented by chemical formula 2 in a manufacturing process of a flat panel display substrate. CONSTITUTION: A resist exfoliating solution composition includes 0.01-5 weight% of an anti-corrosive agent of chemical formula 1, 1-40 weight% of an alkali compound, and 55-90 weight% of solvents including a solvent of chemical formula 2 and other organic solvents. A resist exfoliating solution composition further includes deionized water. A resist exfoliating solution composition further includes at least one kind selected from the group consisting of azol compounds, quinone compounds and alkyl gallate compounds as the anti-corrosive agent. A flat panel display device is characterized in including a flat panel display substrate which is manufactured by using the resist exfoliating solution composition.
申请公布号 KR20130049577(A) 申请公布日期 2013.05.14
申请号 KR20110114677 申请日期 2011.11.04
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 LEE, YU JIN;KO, KYUNG JUN;KIM, SUNG SIK
分类号 G03F7/42 主分类号 G03F7/42
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