| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that it is difficult to extend time width in which a time waveform of a detecting electromagnetic wave can be observed. <P>SOLUTION: A detecting electromagnetic wave and a probe wave are made incident on an electro-optic crystal by inclining a pulse surface of the pulse-like probe wave from a wave surface of the detecting electromagnetic wave. A beam cross-section of the probe wave is divided into a plurality of main scanning unit areas aligned in an intersection line direction between the wave surface of the detecting electromagnetic wave and the pulse surface of the probe wave. Arrival time of the pulse surface of the probe wave at the electro-optic crystal is made different in each main scanning unit area. A delay device changes the delay time of one of the probe wave and the detecting electromagnetic wave from the other. A plurality of waveforms of the detecting electromagnetic wave are acquired by making the delay time different by the delay device and waveform correction information is found out based on deviations in the time axis directions of the plurality of acquired waveforms. A corrected waveform is found out by correcting waveform data obtained by measuring an object to be measured on the basis of the waveform correction information. <P>COPYRIGHT: (C)2013,JPO&INPIT |
