| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity detection element capable of acoustically coupling a plurality of vibration arms to one another, exciting vibration of each of the plurality of vibration arms by one oscillator circuit and enhancing sensitivity of physical quantity detection. <P>SOLUTION: A gyro element (physical quantity detection element) 1 comprises: a base portion 2; a first coupling portion 31 and a second coupling portion 32 individually extending from the base portion 2 along an X-axis in directions opposite to each other; driving vibration arms 4 having driving signal electrodes 7; and detecting vibration arms 5 having detection signal electrodes 8. The driving vibration arms 4 have first to eighth driving vibration arms 41 to 48 extending from a root 6a of the first coupling portion 31 or a root 6b of the second coupling portion 32 in directions along a Y-axis or in oblique directions with respect to the X-axis. The detecting vibration arms 5 have first to eighth detecting vibration arms 51 to 58 extending from the base portion 2 in directions along the Y-axis or in oblique directions with respect to the X-axis. <P>COPYRIGHT: (C)2013,JPO&INPIT |
