| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sample cooling device that can widen a stage-movable range while maintaining sample cooling temperature and stage stop position precision. <P>SOLUTION: The sample cooling device includes: a sample chamber in which a vacuum is maintained; a moving stage arranged in the sample chamber; a sample holder fixation table fitted onto the moving stage while thermally insulated; a sample holder mounted detachably on the sample holder fixation table and holding a sample; a cooling tank provided between the moving stage and a side wall of the sample chamber at a periphery, and containing a refrigerant for cooling the sample; a cold conductor for exchanging heat between the refrigerant contained in the cooling tank and the sample holder fixation table; and a cooling device which cools the refrigerant contained in the cooling tank. The cold conductor has one end fixed to the sample fixation table and the other end as a free end, the free end being dipped in the refrigerant through an opening part of the cooling tank, and moved in the opening part while dipped in the refrigerant as the moving stage moves. <P>COPYRIGHT: (C)2013,JPO&INPIT |
