| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a support body of a contact terminal capable of preventing a deterioration in the contact terminal. <P>SOLUTION: A probe card 10 for inspecting a semiconductor device formed on a semiconductor substrate includes a housing 13 for supporting many probes 12. A body 15 of the housing 13 is configured by stacking a plurality of metal thin plates 14. Each probe 12 is inserted fittingly into each probe hole 16 formed through the body 15 in thickness direction. Each refrigerant flow passage 17 included in the body 15 cools the housing 13. <P>COPYRIGHT: (C)2013,JPO&INPIT |
