| 摘要 |
The present invention relates to a flow rate control device, and the flow rate control device (10) comprises: a body (16) having first and second ports (12, 14) for supplying and discharging pressurized fluid; a set of first and second solenoid valves (18, 20) connected to the upper part of the body (16) and selecting the state of flow of the pressurized fluid; and an opening/closing valve (22) for increasing the flow rate of the pressurized fluid which flows as the result of the selection by the first and second solenoid valves (18, 20). The pressurized fluid is caused to flow from the first port (12) to the second port (14) at a predetermined flow rate while the opening/closing valve (22) is closed, and then the flow rate of the pressurized fluid flowing from the first port (12) to the second port (14) is increased by opening the opening/closing valve (22). |
