PLASMA REACTOR FOR REMOVAL OF CONTAMINANT

摘要

PROBLEM TO BE SOLVED: To provide a plasma reactor for removal of contaminants, which is located between a process chamber and a vacuum pump and generates low pressure plasma to remove contaminants emitted from a process chamber.

SOLUTION: The plasma reactor 310 includes: at least one dielectric body 30 that forms a plasma generation space therein; ground electrodes 41, 42 connected to at least one end of the dielectric body 30; and at least one driving electrode 50 fixed to an outer peripheral surface of the dielectric body 30, and connected to an AC power supply unit 60 to receive an AC driving voltage. Each of the ground electrodes 41, 42 has a non-uniform diameter along the lengthwise direction of the plasma reactor 310.

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