发明名称 PHOTOELECTRIC CONVERSION ELEMENT, AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a photoelectric conversion element having high conversion efficiency and a method for manufacturing a photoelectric conversion element. <P>SOLUTION: In the photoelectric conversion element, an amorphous semiconductor layer is arranged adjacently between a transparent electrode layer and a p-type semiconductor layer, and the oxygen atom concentration of the amorphous semiconductor layer in a side adjacent to the p-type semiconductor layer is lower than the oxygen atom concentration thereof in a side adjacent to the transparent electrode layer. The method for manufacturing the photoelectric conversion element includes supplying carbon dioxide so that the oxygen atom concentration of the amorphous semiconductor layer in the side adjacent to the p-type semiconductor layer is lower than the oxygen atom concentration thereof in the side adjacent to the transparent electrode layer. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013084721(A) 申请公布日期 2013.05.09
申请号 JP20110222886 申请日期 2011.10.07
申请人 SHARP CORP 发明人 KO HIDEKI
分类号 H01L31/04 主分类号 H01L31/04
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