METHOD OF FABRICATING ARRAY SUBSTRATE FOR IN-PLANE SWITCHING MODE LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE: A method for fabricating an array substrate for an in-plane switching mode liquid crystal display device is provided to omit a process for exposing a first conductive material layer to the air by oxidizing the first conductive material layer by using an oxygen plasma process. CONSTITUTION: After a protection layer is formed, a drain electrode(119) and a first conductive material layer(230) are formed in the upper part of a protection layer(116). An oxygen plasma process is performed on the first conductive material layer to oxidize the surface of the conductive material layer. After a second conductive material layer is formed, a photoresist layer is formed. A photoresist pattern is formed by an exposure process. A pixel electrode and a common electrode are formed by etching the first and the second conductive material layer. [Reference numerals] (AA) Oxygen(O2) plasma treatment