| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit occurrence of saving operation of head units 5f, 5b by optimizing a transfer order of substrates S to substrate transfer systems Cf, Cb arranged in parallel with each other to improve through-put. <P>SOLUTION: A substrate supply order determination method comprises: creating a plurality of combinations C(i) of a transfer order of a substrate S to a substrate transfer system Cf and a transfer order of a substrate S to a substrate transfer system Cb; and selecting a transfer order of the substrate S to the substrate transfer systems Cf, Cb from among the plurality of combinations C(i) on the basis of a determination result whether saving operation of head units 5f, 5b from an exclusive region Re occurs when the substrates S are transferred to the substrate transfer systems Cf, Cb in an order indicated by the combination C(i). This optimizes the transfer order of the substrate S to each of the substrate transfer systems Cf, Cb and enables inhibition of occurrence of the saving operation of the head units 5f, 5b thereby being able to improve through-put. <P>COPYRIGHT: (C)2013,JPO&INPIT |
