| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring device capable of achieving a wide measurement range and high measurement accuracy with a simple structure. <P>SOLUTION: A measuring device includes a first light source, a second light source, a first detector, a second detector, and a calculation unit. The first light source generates first light including a scan zone in which a wavelength is scanned between a first wavelength and a second wavelength. The second light source generates second light having a third wavelength. The first detector detects a first interference fringe generated by irradiating each of a reference surface and a test surface with the first light. The second detector detects a second interference fringe by irradiating each of the reference surface and the test surface with the second light. The third wavelength is shorter than a composite wavelength of the first wavelength and the second wavelength. The calculation unit, when cannot calculate order of the second interference fringe from data of a phase of the second interference fringe at a first time, calculates the order of the second interference fringe after the first time on the basis of a change in phase of the first interference fringe in a scan zone after the first time, to calculate a shape of the test surface after the first time by using the calculated order of the second interference fringe. <P>COPYRIGHT: (C)2013,JPO&INPIT |
