发明名称 |
SENSOR ELEMENT, FORCE DETECTING DEVICE, ROBOT AND SENSOR DEVICE |
摘要 |
A sensor element includes a piezoelectric substrate made of a trigonal single crystal and an electrode arranged on the piezoelectric substrate. The substrate surface of the piezoelectric substrate includes an electrical axis of crystal axes. An angle theta formed by the substrate surface and a plane including the electrical axis and an optical axis of the crystal axes is 0°<theta<20°.
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申请公布号 |
US2013112011(A1) |
申请公布日期 |
2013.05.09 |
申请号 |
US201213669879 |
申请日期 |
2012.11.06 |
申请人 |
SEIKO EPSON CORPORATION;SEIKO EPSON CORPORATION |
发明人 |
KAWAI HIROKI |
分类号 |
G01L1/16 |
主分类号 |
G01L1/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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