发明名称 |
POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING CURED PRODUCT, METHOD FOR PRODUCING RESIN PATTERN, CURED PRODUCT AND OPTICAL MEMBER |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition capable of suppressing dissolution of an unexposed part during development. <P>SOLUTION: A positive photosensitive resin composition includes: an inorganic particle (component A); a dispersion agent having an acid group (component B); a solvent (component C); a polymer having a constitutional unit having a group detachable by acid and/or heat (a1) and the constitutional unit having a cross-linking group (a2) (component D); and a photoacid generating agent (component E). An acid value of the component D is 50 mgKOH/g. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013083844(A) |
申请公布日期 |
2013.05.09 |
申请号 |
JP20110224474 |
申请日期 |
2011.10.12 |
申请人 |
FUJIFILM CORP |
发明人 |
FUJIMORI JUNICHI;SHIMONO KATSUHIRO;KUBOTA MAKOTO;SUZUKI SEIICHI |
分类号 |
G03F7/039;C08F20/26;G03F7/004;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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