| 摘要 |
<p>PURPOSE: A substrate transferring apparatus is provided to increase the lifetime of a guide roller by suppressing friction between a substrate and the guide roller. CONSTITUTION: A transfer shaft(120) includes a first helical gear(145). The transfer shaft supports the lower side of a substrate and rotates. A guide roller(140) supports both sides of the substrate and rotates. A guide shaft(142) includes a second helical gear(141) which is engaged with the first helical gear. The guide shaft is combined with the guide roller.</p> |
