| 摘要 |
<p>PURPOSE:To improve the throughput by providing a nearly square main opening part which has corner expanded parts at four corners at the center part of a mask main body and providing phase shift parts near by the sides. CONSTITUTION:The main opening part 13 is formed at the center part of the square mask main body plate 11, the phase shift parts 12 are provided at specific intervals from the four sides of the main opening part 13, and the corner extended parts 13a are formed at the respective corner parts. In this case, phase shift light which is made incident through the phase shift parts 12 is opposite in phase from light passed through the main opening part 13. Here, the amplitude of the phase shift light should be subtracted from the amplitude of the light passed through the main opening part 13. Consequently, the amplitude profile of exposure light obtained through the mask 10 has a steep gradient and reaches a higher maximum value.</p> |
