| 摘要 |
PURPOSE: An adsorption structure of a vacuum chuck is provided to easily adhere a work piece which a hole is penetrated in a central part and to easily perform penetration work forming the hole in the work piece. CONSTITUTION: An adsorption structure of a vacuum chuck comprises a plurality of support protrusions, a vacuum groove, a vacuum chuck groove, a vacuum path, a screw coupling hole, a vacuum hole, a plurality of horizontal and vertical paths(117,118), an opening and closing screw, and an O-ring. The horizontal and vertical paths are formed inside a main body to communicate with the screw coupling hole and the vacuum hole. The opening and closing screw is coupled with the screw coupling hole. The O-ring is inserted to the opening and closing screw.
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