| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor device capable of measuring a degree of vacuum in an inside of the sensor device (sealed space). <P>SOLUTION: This sensor device is provided with the sealed space sealed in a vacuum condition, and is provided, in the sealed space, with a sensor part and a vacuum gage for measuring the degree of vacuum in the sealed space. The sealed space is formed by joining a plurality of substrates, and ambient temperature junction is used for the joining. The sensor device is provided, in particular, with a sensor substrate having at least one part of the sensor part, and a frame-like frame part arranged in its outside, a support substrate joined to the frame part over the full circumference of the frame part in the sensor substrate, in one surface side of the sensor substrate, and a sealing substrate joined to the frame part over the full circumference of the frame part in the sensor substrate, in the other surface side of the sensor substrate, and the sealed space is a space formed of the frame part, the support substrate and the sealing substrate. <P>COPYRIGHT: (C)2009,JPO&INPIT |
