发明名称 |
Scanning probe microscope |
摘要 |
The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions.
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申请公布号 |
US8438661(B2) |
申请公布日期 |
2013.05.07 |
申请号 |
US20070446152 |
申请日期 |
2007.10.18 |
申请人 |
BLANK DAVID HERMANUS ADRIANUS;RIJNDERS AUGUSTINUS JOSEPHUS HELENA MARIA;BROEKMAAT JOSKA JOHANNES;ROESTHUIS FRANK JOHAN GERHARDUS;UNIVERSITEIT TWENTE |
发明人 |
BLANK DAVID HERMANUS ADRIANUS;RIJNDERS AUGUSTINUS JOSEPHUS HELENA MARIA;BROEKMAAT JOSKA JOHANNES;ROESTHUIS FRANK JOHAN GERHARDUS |
分类号 |
G01Q30/20;G01Q10/00 |
主分类号 |
G01Q30/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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