| 摘要 |
<p>PURPOSE: A multi-wavelength interferometer, a measuring device, and a measuring method are provided to obtain the multi-wavelength interferometer which does not decrease measurement accuracy even though a measurement surface is tilted. CONSTITUTION: A multi-wavelength interferometer comprises beam splitters(12,13), a frequency shifter(9), an optical system, a dividing unit, and a detection unit. The beam splitters spit light fluxes into reference beams and measurement beams. The frequency shifter shifts frequencies of the reference beams or measurement beams or makes the frequencies of the reference beams and measurement beams different by shifting the frequencies of the reference beams and measurement beams. The optical system makes the measurement beams incident into the measurement surface and the measurement beams reflected by the measurement surface coherent with the reference beams, thereby obtaining coherent lights. The dividing unit divides the coherent beams into a plurality of optical beams. The detection unit detects the optical beams divided into the dividing unit per each wavelength. [Reference numerals] (23) Computing device; (7) Laser control unit; (9) Frequency shifter; (AA) Measurement surface</p> |
