发明名称 METHOD FOR MOLECULAR ADHESION BONDING AT LOW PRESSURE
摘要 A three-dimensional composite structure that includes a wafer and layer of semiconductor crystalline material bonded thereto, with the layer including first and second series of microcomponents on the first and second faces respectively, with the microcomponents being in alignment such that any residual alignment offsets between the first and second series of microcomponents are less than 100 nm homogeneously over the entire surface of the structure.
申请公布号 US2013105932(A1) 申请公布日期 2013.05.02
申请号 US201213718624 申请日期 2012.12.18
申请人 SOITEC;SOITEC 发明人 BROEKAART MARCEL
分类号 H01L27/14 主分类号 H01L27/14
代理机构 代理人
主权项
地址