| 摘要 |
A spectrophotometer includes a fixed substrate having a fixed reflecting film, a movable substrate having a movable reflecting film, a tunable interference filter having a static actuator changing the gap distance of an inter-reflecting film gap between the fixed reflecting film and the movable reflecting film, a detecting section detecting the light intensity of a light extracted by the tunable interference filter, a voltage setting section and a voltage controlling section that apply a continuously-varying analog voltage to the static actuator, a voltage monitoring section monitoring the voltage applied to the static actuator, and a light intensity obtaining section obtaining the light intensity detected by the detecting section when the voltage monitored by the voltage monitoring section becomes a predetermined voltage to be measured. |
