| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optimal structure of a cantilever type probe with a double arm structure, a probe structure for improving adhesion strength of an upper arm to a spacer, and a method for manufacturing the probe. <P>SOLUTION: A probe card includes a probe 10 consisting of a contact 12 and an arm part where the contact 12 is attached to one end part of the arm part formed by two plates of an upper arm 24 and a lower arm 16, and the other end part is fixed. The upper arm 24 is joined to the lower arm 16 through a spacer A18 and a spacer B20, and the spacer A18 has a recessed part 22 formed on a contact surface to the upper arm 24, and an anchor shape allowing a part of the upper arm to bite into the spacer A18. The recessed part 22 formed by driving an indenter to the spacer A18 and having an opening smaller than an indenter shape driven by strain processing can further improve adhesion strength. <P>COPYRIGHT: (C)2013,JPO&INPIT |
