| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a particle optical system capable of operating a charged particle small beam with high accuracy, by using a high density charged particle small beam. <P>SOLUTION: The particle optical device comprises at least one charged particle source 301 generating a charged particle beam, at least one porous plate 313 having a plurality of apertures, on the downstream side of which a plurality of charged particle small beams 3 are formed from a charged particle beam 309, and each charged particle small beam has a focus 323 in the focusing area thereof, a focus lens device 307 having the effect of a field lens in the focusing area of the porous plate in which the focus of the charged particle small beam is formed, and an objective lens 102 for forming the image of the focusing area of the porous plate on an object that can be positioned on the subject surface of the particle optical device. <P>COPYRIGHT: (C)2013,JPO&INPIT |
