Apparatus to coat photoresist on substrate,申请号KR20090114292-传众专利搜索

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发明名称	Apparatus to coat photoresist on substrate
摘要
申请公布号	KR101182396(B1)	申请公布日期	2012.09.12
申请号	KR20090114292	申请日期	2009.11.25
申请人		发明人
分类号	H01L21/302;H01L21/027	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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