| 发明名称 |
SEMICONDUCTOR DEVICE INCLUDING IN WAFER INDUCTORS, RELATED METHOD AND DESIGN STRUCTURE |
| 摘要 |
An Integrated Circuit (IC) and a method of making the same. In one embodiment, the IC includes: a substrate; a first set of trenches formed in a first surface of the substrate; a second set of trenches formed in a second surface of the substrate; and at least one through silicon via connecting the first set of trenches and the second set of trenches.
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| 申请公布号 |
US2013105941(A1) |
申请公布日期 |
2013.05.02 |
| 申请号 |
US201113282123 |
申请日期 |
2011.10.26 |
| 申请人 |
VANSLETTE DANIEL S.;ELLIS-MONAGHAN JOHN J.;CAMILLO-CASTILLO RENATA A.;RASSEL ROBERT M.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
VANSLETTE DANIEL S.;ELLIS-MONAGHAN JOHN J.;CAMILLO-CASTILLO RENATA A.;RASSEL ROBERT M. |
| 分类号 |
H01L23/48;G06F17/50;H01L21/02 |
主分类号 |
H01L23/48 |
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