发明名称 |
PLANARIZED ELECTRODE FOR IMPROVED PERFORMANCE IN BULK ACOUSTIC RESONATORS |
摘要 |
In a representative embodiment, a bulk acoustic wave (BAW) resonator, comprises: a cavity disposed in a substrate; a first electrode disposed over the cavity; a planarization layer disposed adjacent to the first electrode; a piezoelectric layer disposed over the first electrode; and a second electrode disposed over the piezoelectric layer. |
申请公布号 |
US2013106534(A1) |
申请公布日期 |
2013.05.02 |
申请号 |
US201113286038 |
申请日期 |
2011.10.31 |
申请人 |
BURAK DARIUSZ;NIKKEL PHIL;CHOY JOHN;SHIRAKAWA ALEXANDRE;BADER STEFAN;AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) LTD. PTE. |
发明人 |
BURAK DARIUSZ;NIKKEL PHIL;CHOY JOHN;SHIRAKAWA ALEXANDRE;BADER STEFAN |
分类号 |
H03H9/54 |
主分类号 |
H03H9/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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