| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the uniformity of the thickness of a thin film of a coating liquid formed by an ink jet method. <P>SOLUTION: A coating head 10 includes a solvent supply mechanism 18 connected to the front side of a coating liquid supply mechanism 12 in its advancing direction and a gas jetting mechanism 14 connected to the rear side of the coating liquid supply mechanism 12 in its advancing direction. As the coating head 10 is moved relative to a substrate W, a solvent is supplied from the solvent supply mechanism 18 onto the substrate W, and then a coating liquid is supplied from the coating liquid supply mechanism 12 onto a film of the solvent, and finally a gas is jetted from the gas jetting mechanism 14 onto the irregular surface of the coating liquid to smooth the surface of the thin film of the solvent. <P>COPYRIGHT: (C)2013,JPO&INPIT |
