POLYSILICON CRYSTAL FILM INSPECTION METHOD AND INSPECTION DEVICE

摘要

Provided is a polysilicon crystal film inspection method and inspection device which are capable of detecting microcrystals that appear discretely. A CPU (15) divides an image captured with a CCD camera (12) into a plurality of first divided areas (41) in the Y direction, and a plurality of second divided areas (42) in the X direction, and calculates a first density value distribution property that represents density distribution in the X direction of the first divided areas (41) and a second density value distribution property that represents density distribution in the X direction of the second divided areas (42). Out of a plurality of third divided areas (43) which are the first divided areas (41) divided in the X direction, the third divided areas (43) in which the first or second density value distribution property is at a reference density value or more are treated as black areas. The number of black areas in the X direction is counted and parts composed of black areas with a counting value of a predetermined value or more are determined as intermittent columnar portions that cannot be accepted.