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发明名称
POLYCRYSTALLINE SILICON PRODUCTION
摘要
申请公布号
KR20130044326(A)
申请公布日期
2013.05.02
申请号
KR20137004111
申请日期
2011.07.19
申请人
REC SILICON INC.
发明人
JAYAKAR KRISHNAKUMAR M.;KULTGEN URBAN R.
分类号
H01L21/205;C23C16/24
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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