发明名称 Semiconductor memory device having vertical transistor and buried bit line and method for fabricating the same
摘要 A semiconductor memory device includes an active region protruding upward from a substrate, wherein the active region is arranged next to a trench on the substrate, a first impurity region formed at an upper portion of the active region, a second impurity region formed at a lower portion of the active region, a gate dielectric layer formed along a side of the active region between the first impurity region and the second impurity region, a gate electrode layer formed on the gate dielectric layer, a buried bit line formed at a lower portion of the trench, and a polysilicon layer formed over the buried bit line, wherein the polysilicon layer electrically connects the buried bit line with the second impurity region.
申请公布号 US8431981(B2) 申请公布日期 2013.04.30
申请号 US201113077116 申请日期 2011.03.31
申请人 KIM BAEK MANN;KIM JUN KI;EUN YONG SEOK;ROUH KYONG BONG;SK HYNIX INC. 发明人 KIM BAEK MANN;KIM JUN KI;EUN YONG SEOK;ROUH KYONG BONG
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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