| 摘要 |
In a semiconductor test apparatus, a voltage source generates a power supply voltage to be supplied to a DUT. A decision processor makes the DUT execute a predetermined test sequence. A noise generator superimposes a periodic pulse-like noise voltage on the power supply voltage to be supplied to the DUT, while the test sequence is being executed. The noise generator superimposes a noise voltage synchronized with a clock signal to be supplied to the DUT. |
