| 摘要 |
A filter for filtering macro-particles from a plasma beam, the filter comprising a bended duct for carriage of said plasma beam, the bended duct comprising an intermediate portion connected at one end to an inlet portion having a longitudinal axis disposed on an inlet plane and at another opposite end to an outlet portion having a longitudinal axis disposed on an outlet plane, said inlet portion allowing said plasma beam containing macro-particles to travel toward said intermediate portion in an incident direction and said outlet portion allowing said plasma beam to travel from said intermediate portion in an emergent direction, said intermediate portion being configured to deviate the incident direction to the emergent direction at an angle of more than 90° and thereby remove macro-particles from said plasma beam as it passes through said intermediate portion, and wherein said inlet plane and outlet plane are disposed at an offset angle from each other. |
