发明名称 |
Cubic nitride templates |
摘要 |
A polymer-assisted deposition process for deposition of epitaxial cubic metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be used as templates for the development of high quality cubic GaN based electronic devices. |
申请公布号 |
US8431253(B2) |
申请公布日期 |
2013.04.30 |
申请号 |
US20090321705 |
申请日期 |
2009.01.22 |
申请人 |
BURRELL ANTHONY K.;MCCLESKEY THOMAS MARK;JIA QUANXI;MUELLER ALEXANDER H.;LUO HONGMEI;LOS ALAMOS NATIONAL SECURITY, LLC |
发明人 |
BURRELL ANTHONY K.;MCCLESKEY THOMAS MARK;JIA QUANXI;MUELLER ALEXANDER H.;LUO HONGMEI |
分类号 |
B32B9/00;B32B9/04;B32B13/04;B32B15/04;B32B19/00 |
主分类号 |
B32B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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