Micro-electromechanical resonator geometry

摘要

A micro-electromechanical resonator suspended from an anchor. The resonator has: a length; a first width at a first distance from the anchor; and a second width at a second, greater distance from the anchor. The second width is greater than the first width, and the width of the resonator tapers gradually along at least part of its length from the second width to the first width.