METHOD OF FORMING NON-VOLATILE MEMORY DEVICE HAVING SMALL CONTACT AND RELATED DEVICE

摘要

PURPOSE: A method for forming a nonvolatile memory device with a small contact and a related device are provided to reduce a contact area between a data storage plug and a bottom electrode by decreasing a horizontal width of a first part. CONSTITUTION: A pipe type electrode includes a first part(41A) and a second part. The second part of the pipe type electrode is secondly trimmed. A sacrificial spacer is removed. The first part of the pipe type electrode is exposed. A data storage plug(63) is formed on the first part of the pipe type electrode.