METHOD FOR COMPENSATING POSITION OF MEASURING DEVICE ON XY STAGE

摘要

PURPOSE: A method for compensating the position of a measuring device on an XY stage is provided to easily correct a position by using the angle data of a head. CONSTITUTION: A first and a second measuring device are mounted on a head. The position compensation of the first measuring device is performed(S20). The angle of a head is measured to calculate angle data(S30). The relative position data of the first and the second measuring device is calculated(S40). The position compensation of the second measuring device is performed by using the relative position data(S50). [Reference numerals] (S10) Inputting a command position for a first measuring device; (S20) Correcting the position of the first measuring device; (S30) Calculating angle data of a head for each command position; (S40) Calculating relative position data of a second measuring device to the first measuring device; (S50) Correcting the position of the second measuring device using the angle data and the relative position data;