摘要 |
<P>PROBLEM TO BE SOLVED: To provide a driving device which has superior sealing properties and maintainability in separating a space. <P>SOLUTION: A driving device 80 which has two rotary shafts (an outer output shaft 150 and an inner output shaft 250) coaxially has a vacuum seal 170 between a main-body case 300 and the outer output shaft 150 and also has a vacuum seal 270 between the outer output shaft 150 and the inner output shaft 250 to separate a space inside the main-body case 300 of the driving device 80 and a space outside the main-body case 300 from each other. Consequently, even when the driving device 80 is used in a pressure-reduced environment, the space (atmospheric-pressure environment side) in the main-body case 300 of the driving device 80 and the space on the pressure-reduced environment side can be separated, so that the driving device 80 can be used in the pressure-reduced environment. <P>COPYRIGHT: (C)2013,JPO&INPIT |