MANUFACTURING METHOD FOR CONTROLLING WALL ANGLE OF CONTACT HOLE OF LIQUID CRYSTAL DISPLAY DEVICE

摘要

A manufacturing method for controlling wall angle of contact hole of liquid crystal display device comprises the following steps: (A) coating photoresist on a substrate to form a photoresist layer; (B) exposing the photoresist layer by using a photo-hardening monomer with a predetermined pattern; and (C) developing the treated photoresist layer by using a developing agent, and controlling the developing time, developing temperature and concentration of the developing agent to obtain a contact hole at a predetermined angle. By using the dissolving characteristic of the photoresist material including the photo-hardening monomer, the inclined wall angle of the contact hole is accurately controlled between 45 degrees and 70 degrees.