| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cryogenic refrigerator in which pressure difference between a high-pressure side and a low-pressure side of a compressor is reduced. <P>SOLUTION: The cryogenic refrigerator includes a refrigerator body configured to produce cold temperatures by expanding a refrigerant gas; the compressor 12 connected to a high-pressure side pipe 15A for feeding the refrigerant gas of a high pressure to the refrigerator body, and connected to a low-pressure pipe 15B for collecting the refrigerant gas of a low pressure from the refrigerator body; a buffer tank 80 configured to store the refrigerant gas; a buffer valve VB provided in a first connecting pipe 81 connecting the buffer tank 80 and the refrigerator body; a high-pressure side valve VL provided in a second connecting pipe 82 connecting the buffer tank 80 and the high-pressure side pipe 15A; and a low-pressure side valve VL provided in a third connecting pipe 84 connecting the buffer tank 80 and the low-pressure side pipe 15B. <P>COPYRIGHT: (C)2013,JPO&INPIT |
